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NMM Pressure Sensors

Product Description

Semiconductor Nano & Micro Membrane (NMM) sensor materials are thin, flexible, mechanically and chemically robust materials that can be patterned as two dimensional multi-sensor element arrays using silicon on insulator and CMOS-compatible MEMs technologies.  NMM sensors and arrays can be embedded into small probes or conformally attached onto vehicle and model surfaces for dynamic and static pressure measurements as follows:

  • Frequency bandwidth:  DC to 1MHz
  • Pressure measurement accuracy:  0.5% full scale
  • Temperature range:  -196C to 100C
  • Miniaturized sensor package

 

Applications

Semiconductor NMM pressure sensors can be used for industrial process monitoring, distributed pressure mapping, and instrumentation of transonic, super sonic and hypersonic wind tunnel models.

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