Semiconductor Nano & Micro Membrane (NMM) sensor materials are thin, flexible, mechanically and chemically robust materials that can be patterned as two dimensional multi-sensor element arrays using silicon on insulator and CMOS-compatible MEMs technologies. NMM sensors and arrays can be embedded into small probes or conformally attached onto vehicle and model surfaces for dynamic and static pressure measurements as follows:
- Frequency bandwidth: DC to 1MHz
- Pressure measurement accuracy: 0.5% full scale
- Temperature range: -196C to 100C
- Miniaturized sensor package
Semiconductor NMM pressure sensors can be used for industrial process monitoring, distributed pressure mapping, and instrumentation of transonic, super sonic and hypersonic wind tunnel models.